Machine Learning Enhanced Model Based Optical Proximity Correction Framework With Convolutional Neural Network Based Variable Threshold Method Near the Diffraction Limit

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Oct 25, 2025 - 22:40

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$Machine Learning Enhanced Model Based Optical Proximity Correction Framework With Convolutional Neural Network Based Variable Threshold Method Near the Diffraction Limit$

Machine Learning Enhanced Model Based Optical Proximity Correction Framework With Convolutional Neural Network Based Variable Threshold Method Near the Diffraction Limit

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